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About this Manual
We've added this manual to the Agilent website in an effort to help you support
your product. This manual is the best copy we could find; it may be incomplete
or contain dated information. If we find a more recent copy in the future, we will
add it to the Agilent website.
Support for Your Product
Agilent no longer sells this product. Our service centers may be able
to perform calibration and repair if necessary, but no other support from
Agilent is available. You will find any other available product information on the
Agilent Test & Measurement website, www.tm.agilent.com.
HP References in this Manual
This manual may contain references to HP or Hewlett-Packard. Please note that
Hewlett-Packard's former test and measurement, semiconductor products and
chemical analysis businesses are now part of Agilent Technologies. We have
made no changes to this manual copy. In other documentation, to reduce
potential confusion, the only change to product numbers and names has been in
the company name prefix: where a product number/name was HP XXXX the
current name/number is now Agilent XXXX. For example, model number
HP8648A is now model number Agilent 8648A.
OPERATION AND SERVICE MANUAL
MODEL 4140B
pA METER/DC VOLTAGE SOURCE
SERIAL NUMBERS
- This manual applies directry to instruments with
serial numbers prefixed 2129 J .
With changes described in Section VU, this
manual also applies to instruments with serial
numbers prefixed 2034J.
`c COPYRIGHT YOKOGAWA-HEWLm-PACKARD. LTD., 1980
9-1, TAKAKURA-CHO, HACHIOJI-SHI, TOKYO, JAPAN
Manual Part No. 04140-90021
Microfiche Part No. 04140-90071 Printed : APR. 1987
Model 4140B
Table of Contents
TABLE OF CONTENTS
Sect ion Title Page Section Title Page
I GENERAL INFORMATION ............... l-l 3-33. VS Section
Operating Parameters ... 3-15
l-l. Introduction ................ l-l 3-35. Voltage Output
l-4. Description ................. l-l and Display of VS . . . . . . 3-15
1-9. Specification ............... 1-2 3-37. Output Voltage Range . . . . . 3-19
l-11, Safety Considerations ....... 1-2 3-39. Current Limit ............ 3-19
1-14. Instruments 3-41. VS Section
Covered by Manual ......... l-3 Operating Instructions . 3-19
1-19. Options .................... 1-13 3-43. I-V Measurement ............ 3-22
1-21. Option 907, 908 or 909 ... 1-13 3-45.~ I-V Measurement
l-23. Option 910 Extra Manual . . 1-13 Data Output ............ 3-22
l-25. Accessories Supplied ....... 1-13 3-47. I-V Measurement
l-27. Accessories Available ...... 1-13 Operating Instructions . 3-25
3-49. C-V Measurement ............ 3-29
3-51. C-V Measurement
Data Output ............ 3-29
II INSTALLATION ...................... 2-1 3-53. C-V Measurement Range . . . . 3-29
3-55. C-V Measurement
2-l. Introduction ................ 2-l Zero Offset ............ 3-32
2-3. Initial Inspection .......... 2-l 3-57. C-V Measurement
2-5. Preparation for Use ......... 2-l in Percent .. . . . . . . . . . . . 3-33
2-6. Power Requirements ........ 2-l 3-59. C-V Measurement
2-8. Line Voltage and Fuse Operating Instruct ions . 3-33
Selection ............... 2-1 3-61. DUT Connection ............. 3-41 _
2-10. Power Cable ............... 2-3 3-63. DUT Connection Using
2-12. Operating Environment ..... 2-3 the Wafer Prober ....... 3-44
2-15. Installation Instructions . 2-4 3-65. Annunciations .............. 3-47
2-17. Installation of 3-67. Analog Output .............. 3-49
Options 907, 908 and 909. 2-4 3-69. Control Capabilities for
2-19. Storage and Shipment ........ 2-4 Analog Output .......... 3-49
2-20. Environment ............... 2-4 3-71. HP-IB Interface ............ 3-52
2-22. Packaging ................. 2-4 3-73. Connection to HP-IB ...... 3-52
3-75. HP-IB Status Indicators .. 3-52
3-77. Local Key . . . . . . . . . . . . . . . . 3-52
III OPERATION ......................... 3-l 3-79. HP-IB Control Switch . . . . . 3-52
3-81. HP-IB Interface
3-l. Introduction ................ 3-1 Capabilities of 4140B . . 3-53
3-3. Panel Features .............. 3-l 3-83. Remote Program Code . . . . . . 3-53
3-5. Self Test ................... 3-l 3-85. Parameter Setting ........ 3-56
3-8. Initial Control Settings .... 3-8 3-87. Data Output .............. 3-56
3-10. Measurement Function ........ 3-8 3-89. 1-C Measurement Value and
3-12. pA (Pica-Ampere) Meter VA Output Voltage ...... 3-56
Section ................... 3-9 3-91. Parameter Output ......... 3-57
3-14. pA Meter Display .......... 3-9 3-93. Key Status Data . . . . . . . . . . 3-57
3-16. Current Measurement Ranges. 3-9 3-95. Service Request
3-18. Integration Time Statu Byte . . . . . . . . . . . . . 3-58
and Data Output ........ 3-10 3-97. High Speed I (HSI)
3-21. External Triggering ...... 3-10 Function ............... 3-58
3-23. Zero Offset for 3-99. Programming Guide
Current Measurement .... 3-11 for 4140B . . . . . . . . . . . . . . 3-60
3-25. pA Meter
Operating Instructions . 3-11
3-27. VS (Voltage Source) Section. 3-14
3-29. VS Section Display ....... 3-14
3-31. VS Section Output Modes . . 3-14
ii
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