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                                          Agilent AN 369-5
                                          Multi-frequency C-V Measurement
                                          of Semiconductors
                                          Application Note




Agilent E4980A and 4284A                 Solutions Offered by the
Precision LCR Meters                     E4980A and 4284A
                                         1. Wide Frequency Range                          Thus, the E4980A and the 4284A
Introduction
                                         Measurements from 20 Hz to 2 MHz.                can single-handedy perform C-V
                                                                                          measurements in both the low and
Parameters such as the capacitance
                                         The program listing shown in the                 high frequency ranges. This allows it
of the oxide layer (Cox) and the
                                         appendix was used to measure                     to measure high-loss devices (semi-
density of substrate impurities (Nsub)
                                         the C-V characteristics at 10 kHz,               conductors on large diameter wafers,
that are required in the evaluation of
                                         100 kHz, and 1 MHz of the MOS                    etc.), which are difficult to measure at
the manufacturing process of MOS
                                         device whose characteristics are                 1 MHz, at low frequencies (10 kHz,
type semiconductors can be derived
                                         shown in Figure 1.                               100 kHz, etc.).
by using measured C-V characteris-
tics. To make an accurate evaluation
of these processes, precise C-V
measurements are required. Such
measurements entail the following
difficulties.
                                                        1.0
Difficulties

1. There is no single instrument that
                                                  Cap/cox




   can make C-V measurements from
   low to high frequencies.
2. It is difficult to compensate for
   the additional errors that occur
   when cable extensions or a
   prober are used.                                     0.0
3. The accuracy and reliability of                       

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