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 40 GHz ON-WAFER MEASUREMENTS
             WITH THE
    HP 8510 NETWORK ANALYZER
               AND
CASCADE MICROTECH WAFER PROBES



            Eric Strid, Reed Gleason, Keith Jones
                   Cascade Microtech, Inc.
                         P.O. Box 2015
                  Beaverton, Oregon 97075




   RF & Microwave
   Measurement
   Symposium
   and
   Exhibition

   Flin-   HEWLETT
   ~~ PACKARD




                       www.HPARCHIVE.com
Hewlett-Packard is pleased to have the opportunity to present this paper, written by Eric
Strid, Reed Gleason, and Keith Jones, of Cascade Microtech, Inc., at the RF & Microwave
Measurement Symposium and Exhibition.



Abstract:

The paper presents a system, consisting of the HP 8510 network analyzer and Cascade
Microtech wafer probes, that is used to make RF measurements of microwave devices and
ICs (MMICs) directly on-wafer for frequencies up to 40 GHz. The configuration of the
system and the characteristics of the wafer probes are described. On-wafer calibration
methods including the traditional open, short, load, and the newer thru, reflect, line
(TRL) will be covered. Probe techniques for making the best possible on-wafer
measurements will also be addressed, and a range of on-wafer measurement applications
will be examined.



Biography:

Reed Gleason (M'68) was born in Portland, OR in 1945. He received the B.S. degree in
electronic engineering from the California Institute of Technology, Pasadena, CA, in 1967.
He joined the Naval Research Laboratory in 1967 where he worked on GaAs detector and
mixer diodes, silicon TRAPATT diodes and GaAs and InP MESFETs. He joined
Tektronix in 1978 where he worked on GaAs devices and integrated circuits. In 1983, he
co-founded Cascade Microtech, Inc., where he now holds the position of Vice President of
Engineering.




                                       www.HPARCHIVE.com
                                                                   In this paper, recent developments in wafer probing,
                                                                   including 40 GHz probes and test set for the HP 8510 Vector
                                                                   Network analyzer will be discussed. First, we will describe the
                      OUIUlNllE                                    available equipment and connections for 40 GHz on wafer
                                                                   measurements. The most recent techniques for accurate
1.   Introduction                                                  calibration and verification of the system will then be
                                                                   presented. Techniques for care and cleaning of the probe tips
2.    New equipment for 40 GHz on                                  for maximum mechanical lifetime will be discussed and,
       wafer measurements                                          [mally, some measurement examples will be shown.

3.    Calibration and verification techniques

4.    Probe care

5.    Measurement examples



                                                           7151



                                                                   Five years ago, microwave wafer probing was thought to be
     IEXAMlPllE iQ)AIAfBASlE Of'                                   impossible. Today, microwave wafer probing is accepted as
         1Rf' IPAIRAMlE11EIRS                                      useful and necessary in microwave IC development. TIlls is
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