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   Keysight Technologies
   Imaging Graphene via Low Voltage Field
   Emission Scanning Electron Microscopy
   Application Note

Introduction                                conductivity suggests graphene as            graphene, a SEM must have a small
                                            an excellent transparent conductive          beam spot size corresponding to a high
Pursuing novel materials with intriguing    electrode in flat panel displays, touch      spatial resolution.
properties is always an active field        screens and cathode ray tubes [4]. In
on the horizon of materials science.        order for graphene to fulfill this promise   2) Low beam energy
One paradigm is graphene which has          in large-scale manufacturing of high-        The ultra-thin graphene film is
attracted enormous passions and             performance electronics, high-quality        "transparent" to high energy electron
stimulated extensive research efforts       graphene with large dimensions is            beams. Since the preferred imaging
all over the world since its discovery      needed. Among several techniques for         information for SEM is the secondary
in 2004 [1]. With a monolayer of sp2-       graphene synthesis, chemical vapor           electrons generated by the primary
bonded carbon atoms arranged in a           deposition (CVD) is the most promising       beam in the sample, low beam energy is
honeycomb crystal lattice, graphene is      approach for this purpose owing to the       required to image ultra-thin materials.
a basic building block for all graphitic    high quality of CVD graphene on large        Furthermore, low energy SEMs
materials, from wrapping up into 0D         surface as well as the compatibility         minimize beam induced sample damage
fullerenes, or rolling into 1D nanotubes,   of CVD with current standard wafer-          and sample charging of exposed
to stacking into 3D graphite. For quite     scale lithography and integrated circuit     non-conducting materials, which is
a long time, such a 2D graphitic layer      fabrication processes.                       ideal for imaging graphene films on
had been described as a vintage model                                                    insulating substrates.
because this structure is not stable in     Characterization of graphene films
theory [2]. The success of obtaining        is essential for the quality control         3) High contrast imaging
free-standing graphene, for the first       purposes. Common techniques include          Many features in graphene are difficult
time, by mechanical exfoliation of highly   optical microscopy, atomic force             to image because of poor contrasts.
oriented pyrolytic graphite (HOPG) has      microscopy, Raman spectroscopy,              A perfect graphene monolayer is
immediately entranced both scientists       transmission electron microscopy,            smooth and featureless making it a
in academia trying to understand the        Auger electron spectroscopy, etc.            challenging surface for SEM imaging.
basic behavior of matter and those          Scanning electron microscopy (SEM)           A SEM with inherently high contrast
working in industry trying to explore       is getting more popular for imaging          and with the ability to enhance the
novel applications. Predicted by            graphene because it is a rapid, non-         contrast using multiple detection
theories and followed by experimental       invasive and effective imaging technique     techniques is advantageous.
demonstrations, graphene possesses          which is complimentary to most other
unique electrical, mechanical and           techniques. However, challenges still        4) High performance detector
optical properties. Currently graphene-     exist in SEM imaging of graphene             An efficient, high performance electron
based nanoelectronics are the subject       films. To effectively image graphene,        detector is required for detecting low
of intense focus. For instance, the high    SEM needs to meet the following              energy electrons which provide the
intrinsic mobility in graphene makes it     requirements:                                best surface contrast and topographic
an attractive material for high-speed                                                    sensitivity.
electronics [3], and its high optical       1) High spatial resolution
transmittance coupled with high             Graphene films usually have nanoscale        Fortunately, the low voltage field
                                            features. To resolve the morphology of       emission scanning electron microscopy
(LV FE-SEM) can meet all the above
requirements, hence it is potentially an
ideal technique for graphene imaging.

In this study, different graphene
samples were imaged by using a
Keysight Technologies, Inc. 8500
compact FE-SEM. All samples were
directly mounted on double carbon
tapes without any other sample
preparation followed by loading into the
sample chamber for imaging. With an
innovative miniature all-electrostatic
electron beam column design, Keysight
8500 can achieve high resolutions at
low beam voltages (500 V

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