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5991-2907EN Electromagnetic Simulations at the Nanoscale_ EMPro Modeling and Comparison to SMM Experiments c20141020 [8]


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Keysight Technologies
Electromagnetic Simulations at the
Nanoscale: EMPro Modeling and Comparison
to SMM Experiments

                                                               Application Note




            Introduction
            n this application note, we describe electromagnetic (EM) simulations using Keysight
            Technologies' EMPro software1 to support the interpretation of scanning microwave
            microscope (SMM) experiments. The SMM is a new scanning probe microscope that
            combines the electromagnetic measurement capabilities of a microwave Performance
            Network Analyzer (PNA) with the nanometer-resolution and Angstrom-scale positioning
            capabilities of an atomic force microscope (AFM).

            Scanning microwave microscopy is a technique for measuring reflection scattering
            parameters and corresponding electric properties of materials at the nanoscale in the
            frequency range of 1



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