Service Manuals, User Guides, Schematic Diagrams or docs for : Agilent 5991-3091EN Effect of Annealing on 50nm Gold Films - Application Note c20141027 [4]

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Keysight Technologies
Effect of Annealing on 50nm Gold Films

Application Note

Abstract
Ultra-thin gold ilms are used in many
                                               Ref      Description                                         Condition
modern applications to impart essen-
                                               A        50nm gold ilm on bare wafer (fused Al2O3 and TiC)   As deposited
tial optical qualities to surfaces. In this
work, a new nanoindentation technolo-          A'       50nm gold ilm on bare wafer (fused Al2O3 and TiC)   Annealed 3 hrs
gy, Express Test, is used to evaluate the      B        50nm gold ilm on 2.6m of Al2O3 on bare wafer        As deposited
effect of annealing on 50nm gold ilms.                  50nm gold ilm on 2.6m of Al2O3 on bare wafer        Annealed 3 hrs
                                               B'
Vacuum annealing for three hours (sub
300

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