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7O




Agilent 10737L and Agilent 10737R
Compact Three-Axis Interferometers
       Chapter 7O Agilent 10737L and Agilent 10737R Compact Three-Axis
       Interferometers
       Description



       Description
NOTE   In this subchapter refers to either or both of the Agilent 10737L and
       Agilent 10737R interferometers.

       The Agilent 10737L/R Compact Three-Axis interferometers (see
       figures 7O-1 through 7O-3) allow up to three measurements
       (displacement, pitch, and yaw) to be made on a single axis. The
       Agilent 10737L and Agilent 10737R interferometers are identical
       except that the "L" bends the measurement beams to the left and the
       "R" bends the beams to the right, as viewed from the incoming beam
       (see figures 7O-2 and 7O-3).

       These interferometers are designed to use a 3 mm diameter laser
       beam, available from an Agilent 5517C-003 Laser Head.

       The measurement beam parallelism inherent in the design of the
       Agilent 10737L/R interferometers ensures that there is essentially no
       cosine error between their three measurements and also ensures angle
       accuracy for pitch and yaw measurements.

       These interferometers are designed for direct attachment of
       Agilent 10780F-037 Remote Receiver's fiber-optic sensor head (one per
       axis). The Agilent 10780F-037 receiver is the same as the standard
       receiver, except it does not include the lens assembly that attaches to
       some Agilent interferometers; in this case, the required lens assembly
       is part of the Agilent 10737L/R interferometer. This simplifies user
       assembly, since no optical alignment of the receiver is required. The
       fiber-optic cables from the receivers attach directly to the axis output
       apertures on the input face of the interferometer. See figures 7O-2 and
       7O-3.

       The Agilent 10737L/R interferometers are based on the
       Agilent 10706B High-Stability Plane Mirror Interferometer's design.
       Figure 7O-1 shows two views of an Agilent 10737L interferometer. In
       addition to the Agilent 10706B components, the interferometer
       includes the following assemblies:

       

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