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                                          Number 2972

                                          Using the Model 4200-CVU-PWR C-V Power Package to Make
Application Note                          High Voltage and High Current C-V Measurements with the
           Series                         Model 4200-SCS Semiconductor Characterization System



Introduction                                                         terminals and it is best that the AC ammeter be connected to the
                                                                     gate of the device if applicable. If this is the case, then the HCUR
Traditional capacitance-voltage (C-V) testing of semiconductor       and HPOT (or CVH1) terminals of the 4200-CVU are connected
materials is typically limited to about 30V and 10mA DC              to the other side of the device or to the chuck. The DC bias is
bias. However, many applications, such as characterizing C-V         supplied by the 4200-SMU, with the Force and Sense from the
parameters of LD MOS structures, low k interlayer dielectrics,       SMU connected to the Force and Sense terminals of the bias
MEMs devices, organic TFT displays, and photodiodes, require         tee. The SMU LO terminals and the CVU CVH1 terminals are
higher voltage or higher current C-V measurements. For these         referenced internally to the system output common.
applications, a separate high voltage DC power supply and a
capacitance meter are required to make the measurements.
                                                                            4200-CVU
    The Model 4200-CVU-PWR C-V Power Package for the Model                                                                   C
                                                                              H CUR
4200-SCS allows making C-V measurements with a DC voltage                                       SMA Tee
bias of up to 

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