Service Manuals, User Guides, Schematic Diagrams or docs for : Keithley Appnotes _25233068_EuroAsiaSemi120910

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_25233068_EuroAsiaSemi120910


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                                     A   G R E AT E R   M E AS U R E      O F   CO N F I D E N C E   essential to use triaxial cables for these
                                                                                                     measurements. Figure 1 illustrates how
                                                                                                     these measurements can be made using four
                                                                                                     triaxial cables. The measurement signal is
                                                                                                     carried on the center conductor, the inner
                                                                                                     shield is driven as a guard for the signal, and
                                                                                                     the outer shield is used for safety to shield
                                                                                                     the user from high voltages that may be
                                                                                                     applied to the guard and signal conductors.
                                                                                                     Two cables are necessary in order to achieve
                                                                                                     a remote sense, or Kelvin, connection on



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                                                                                                     each device terminal. Remote sense cables
                                                                                                     allow the instrument to sense the voltage
                                                                                                     at the device accurately. In this figure, the


Measurement
                                                                                                     device to be characterized has two terminals.

                                                                                                     CV Measurements'

Flexibility?                                                                                         Cabling Requirements
                                                                                                     Figure 2 illustrates the cabling for C-V



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                                                                                                     measurements using four coaxial cables. The
                                                                                                     outer shells are connected together to con-
                                                                                                     trol the characteristic impedance the signals


More Flexible Cabling
                                                                                                     see. The outer shells of all four cables must
                                                                                                     be inter-connected near the device under
                                                                                                     test (DUT).

                                                                                                     Pulse Testing Cabling
Wayne Goeke, Senior Staff Technologist and                                                           Requirements
Lee Stauffer, Senior Staff Technologist                                                              Pulsed measurements require the highest
Keithley Instruments, Inc.                                                                           bandwidth of the three measurement types,
                                                                                                     so to prevent reflections off the DUT from




M
                                                                                                     reflecting off the source, the cable must have
                ANY different types of                to the probe tips to be confusing and dif-     a characteristic impedance that matches the
                measurements go into                  ficult. This article explains the different    source impedance. Pulsing does not use a
                characterizing an electrical          cabling requirements associated with each      remote sense cable. Figure 3 illustrates a
                device and the processes              measurement type (Table 1) and describes a     typical connection to a two-terminal DUT.
                involved in its manufacture.          new approach to multi-measurement cabling      Pulsing is the only one of the three meas-
However, current-voltage (I-V), capacitance-          that combines high signal integrity with       urement types that connects the DUT to the
voltage (C-V), and pulse-based meas-                  excellent ease of use.                         outer shield of the cable.
urements are the most commonly made
measurement types in these applications. As           IV Measurements'                               Characteristic Impedances
a result, semiconductor device characteriza-          Cabling Requirements                           Given the challenges created by these dif-
tion systems typically include capabilities           Guarding is crucial to making high integ-      fering cabling requirements for different
for making these measurements, with some              rity low current I-V measurements, so it's     measurement types, Keithley has developed
more successful than others in integrating
these measurements in a way that reduces              Table 1. Cable requirements for IV, CV, and Pulsed IV measurements.
the time and effort required to make them.
                                                        DC IV                    LCR/CV                       Pulsed IV
Perhaps the greatest challenge associated
                                                        Measurements             Measurements                 Measurements
with integrating these measurements is the
fundamentally different cabling require-                



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