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2524 VPI White Paper (1)


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                             WHITE
                             PA P E R




                                          Designing a Semiconductor Characterization
                                         System for an Undergraduate Fabrication Lab


                             Introduction
                                     Virginia Polytechnic Institute and State University recently opened
                             an 1,800 sq. ft. Class 10,000 cleanroom. This cleanroom is designed to help
                             undergraduates learn the elements of the microchip fabrication process over
                             the course of one semester and to encourage them to pursue more advanced
                             studies. Unlike programs based on the use of tightly controlled IC production
                             processes as teaching tools, the equipment used encourages students to
                             experiment to find out how far they can "push" a specific processing tolerance
                             before it affects device parameters. As part of their coursework, students learn
                             how to measure the surface resistivity (i.e., sheet resistance) of test regions on
                             a wafer during processing and to perform I-V characterization of the devices
                             they create, which include capacitors, p-n junction diodes, resistors, and
                             nMOSFETs [1]. This case study describes a simple, cost-effective parameter
                             analysis system, built of easily obtainable components and programmed using
                             a commercial, off-the-shelf test and measurement automation programming
                             environment.




Keithley Instruments, Inc.
28775 Aurora Road
Cleveland, Ohio 44139
(440) 248-0400
Fax: (440) 248-6168
www.keithley.com
                                     A    G r e a t e r   M e a s u r e     o f   C o n f i d e n c e
Requirements
      To address the needs of this high throughput undergraduate laboratory, the
semiconductor characterization system had to meet several requirements:



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