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2665 Strategic Fabrication


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                                      A   G R E AT E R   M E A S U R E   O F   C O N F I D E N C E    with the skills needed to develop new elec-
                                                                                                      trical test methodologies for new materials
                                                                                                      and translate the volumes of data these tests
                                                                                                      will produce into usable process knowledge.
                                                                                                      While this level of expertise is often avail-
                                                                                                      able in the lab environment, it's often diffi-
                                                                                                      cult to transfer that knowledge to the produc-
                                                                                                      tion setting. In order to remain competitive,
                                                                                                      test suppliers and fabs will need to form even
                                                                                                      deeper partnerships and cooperative devel-
                                                                                                      opment initiatives in order to create new test
                                                                                                      methodologies to ramp up new processes
                                                                                                      based on new materials.
                                                                                                          One of the first steps test vendors must
                                                                                                      take in helping the industry adjust to the
                                                                                                      new materials and new test methodologies is



Strategic Fabrication
                                                                                                      working with fabs to better distinguish be-
                                                                                                      tween commodity testing and value-added
                                                                                                      or strategic testing. The perception within


Demands
                                                                                                      the IC industry is that the cost of test per
                                                                                                      device is staying steady or increasing while
                                                                                                      the cost of processing per device is drop-


Strategic Testing                                                                                     ping. While this may, in fact, be true for
                                                                                                      functional testers, which typically have pro-
                                                                                                      prietary designs and aren't repurposable for
                                                                                                      new devices, it's far from true for parametric
                                                                                                      test and device characterization/parametric
Linda C. Rae, Senior Vice President and General Manager                                               analysis solutions. Today, the most far-sight-
Keithley Instruments, Inc.                                                                            ed parametric test vendors understand that
                                                                                                      their customers are increasingly unwilling or




A
                                                                                                      unable to afford to replace their testers after
             S the demand for low power             through device scaling. In fact, performance      several technology nodes. Instead, they offer
             mobile devices continues to            gains attributable to the use of new materi-      test platforms that separate the repurposable
             drive down device voltages, it's       als were equal to those attributable to device    "commodity" portions of the system (system
             become increasingly difficult to       scaling for the first time at the 90nm node. As   controller, power supplies, basic DC instru-
             produce devices that operate in a      45nm processes inch their way toward pro-         mentation, prober, test head, etc.) from the
stable manner within narrower performance           duction, IC makers continue to push devices       "strategic" portion (modular instrumenta-
margins, even when they're produced with            based on their new materials into production      tion and fixtures designed to handle func-
well-understood processes and materials like        at mind-numbing rates. Unlike traditional Si/     tions like AC impedance, RF, pulse, and
Si/SiO2 /polysilicon/Al. Helping fabs address       SiO2 /polysilicon/Al materials systems, these     reliability testing). Separating the commod-
this challenge demands that test vendors            new processes often include less electrically     ity portion of the system from the strategic
deliver new, more sensitive electrical test         stable materials, like sSOI/high k/metal/Cu/      portion allows fabs to span multiple technol-
methodologies 



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