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2845 ACS Multi-Site Parallel Test AN


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                                                        Number 2845
                  A Tektronix Company


                                                     ACS Integrated Test System for
Application Note                                     Multi-Site Parallel Test
           Series

                                                          Solution Concept                                     System Architecture
                                                          First, consider the device under test                It is easiest to think of a multi-site
                                                          (DUT). A DUT often includes a number                 tester as a system of mini testers. Each
                                                          of elements that need to be tested. In a             mini tester consists of all the resources
                                                          sequential test regime, the testing of each          needed to execute a suite of tests on a
                                                          element, no matter how simple, adds                  single site. Figure 3 shows a system of
                                                          to the overall test time. If two identical           two mini testers. Each mini tester has
                                                          elements can be tested in parallel, or               several analog source-measure units
                                                          even better, two identical and physically            (SMUs), a test sequencer/controller, and an
                                                          adjacent chips (as shown in Figure                   optional switch matrix. The independent
                                                          2) can be tested in parallel, the total              controllers allow each mini tester to
                                                          test throughput can be doubled. Not                  operate autonomously from the other
                                                          only is the tester throughput doubled,               mini testers and the system controller.
                                                          the number of prober moves is cut in                 In this way, the system controller does
                                                          half, resulting in significant test system           not gate the execution of the testing,
                                                          throughput improvement.                              but rather initiates test sequences and
                                                              It is important to pay critical attention        organizes the resulting test data.
                                                          to the possible parasitic interactions                   Keithley's ACS integrated test systems
                                                          between chips. For instance, the coupling            support the mini tester architecture
Figure 1. This example ACS integrated test system         through the wafer substrate may require              through the use of our Series 2600B
is configured for parallel, multi-site testing, which     that certain low current tests be executed           System SourceMeter



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