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2949_Wafer_Level_Test


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                                       A      GREAT ER   M EA SU R E    O F   C O N F I D E N C E        (TEGs) will be covered in a subsequent
                                                                                                         article.
                                                                                                     2. Particularly for new device technologies,
                                                                                                         it's essential to establish a measurement
                                                                                                         baseline using sequential testing prior to
                                                                                                         implementing parallel test. Variations in
                                                                                                         device performance are more common
                                                                                                         with new technologies than with existing
                                                                                                         ones. Given that one of the objectives of
                                                                                                         parametric testing is to understand where
                                                                                                         the variations in the process are and then
                                                                                                         to reduce them through the development
                                                                                                         process, it's critical to establish this
                                                                                                         sequential test baseline; parallel testing
                                                                                                         may introduce additional variations as



Implementation
                                                                                                         a result of either tester timing or device
                                                                                                         interference. Without a sequential test
                                                                                                         baseline for comparison, it's impossible to


of Wafer Level
                                                                                                         distinguish between "new device" varia-
                                                                                                         tions and "parallel test" variations. When
                                                                                                         using a Keithley parametric test systems


Parallel Test                                                                                            the company's pt_execute software pro-
                                                                                                         vides a toolset and coding method for
                                                                                                         parallel test that allows switching from
                                                                                                         sequential to parallel testing quickly
                                                                                                         and easily. It also manages test resource
randall Lee                                                                                              allocation.
Keithley Instruments, Inc.                                                                           3. For new processes, the best time to turn




P
                                                                                                         parallel test "on" is at the beginning of
              araLLeL parametric test is an          increasing the number of measured param-            a volume ramp. This strategy offers the
              emerging strategy for wafer-level      eters even when continuing to test existing         greatest bang for the investment buck by
              testing that involves concurrent       structures.                                         reducing the number of testers needed as
              execution of multiple tests on                                                             the product goes into volume production.
              multiple scribe line test struc-       Planning For Parallel Test                          Note: It is best to learn how to use par-
tures. It offers a relatively inexpensive way            Parallel Test Candidates 



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