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2951_Test_Structure_Design


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                                        A    GREAT ER   M EA SU R E             O F    C O N F I D E N C E                     probe pads that connect to more than one
                                                                                                                               device under test (DUT). The most frequent
                                                                                                                               application for common pads is to connect
                                                                                                                               the source terminals together for a set of
                                                                                                                               transistors (Figure 1).
                                                                                                                                   However, connection of multiple DUTs to
                                                                                                                               one probe pad can require substantial lengths
                                                                                                                               of metal line between the DUTs, resulting
                                                                                                                               in substantial parasitic resistances. In turn,
                                                                                                                               currents flowing through the metal line can
                                                                                                                               introduce substantial voltage drops.
                                                                                                                                   In Figure 1, R1, R2, and R3 represent
                                                                                                                               parasitic resistances and voltage drops in the
                                                                                                                               line connecting the common source pad to



Test Structure Design
                                                                                                                               the transistor source terminals:
                                                                                                                               



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