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S530 Brochure


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         S530
         Semiconductor Parametric Test Systems
         Cost-effective, high throughput solutions




                                                    n   Low acquisition cost; low cost
                                                        of ownership
                                                    n   Round-the-clock productivity
                                                    n   Readily adaptable to new devices
                                                        and test requirements
                                                    n   Fast, flexible, interactive test
                                                        plan development
                                                    n   Wide range of configuration and
                                                        measurement options




a   g r e a t e r   m e a s u r e   o f   c o n f i d e n c e
          S530 systems combine the speed and
          low acquisition cost your test floor demands today. . .                                                                                                                                                  . . . with the low cost of ownership, flexibility,
                                                                                                                                                                                                                                  and adaptability you'll need tomorrow.
                                                                                                                                           SMU     SMU        SMU      SMU
                                                                                                                                            A       B          A        B
                                                                                                                                            Processor
          Traditional "big iron" parametric testers are fine for ultra-high-volume                                                          (Master)           Processor
          fabs that only test a limited number of processes and products using




                                                                                                                                                                                 Processor
                                                                                                                              System                    TSP Bus                                           To
          lower voltages and currents. But for a growing number of fabs, they're                                             Controller
                                                                                                                                                                                             Switch
                                                                                                                                                                                                      Probe Card
                                                                                                                                                                                             Matrix
          simply too expensive and too inefficient, and do not provide the                                                                                                                              Adapter
          higher voltages needed for a wide range of power devices. Today's
                                                                                                                                            Processor          Processor
          high mix, lower volume fab environments demand flexible systems
          designed to switch quickly from testing one product or technology to                                                             SMU     SMU        SMU      SMU
                                                                                                                                            A       B          A        B
          another. Keithley's S530 Parametric Test Systems embody the
          knowledge and expertise we've acquired over the last four decades in
          cost-effective, high throughput semiconductor testing.
                                                                                                                                                             Engineered for production parametric test

                                  S530 Performance Envelope
                                    S530 Performance Envelope
                    1E+0                                                                                                 Keithley's production-qualified source measure unit (SMU)
                                                                                                                         instruments speed and simplify DC I-V testing, ensure high accuracy
                                                                                                                         and repeatability, and extend hardware life. Measurement commands
                    1E



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