Service Manuals, User Guides, Schematic Diagrams or docs for : Keithley SCS S530 S530_VanDerPauwSheetRstnce

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S530_VanDerPauwSheetRstnce


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                                            Number 3180


Application Note                           Performing van der Pauw Sheet
           Series                          Resistance Measurements Using the
                                           Keithley S530 Parametric Tester
Accurate low voltage measurements are essential to many               compared to the area of the structure), be homogenous in
semiconductor tests. Often, test structures such as contact chains,   composition, and be symmetrical. More importantly, the contacts
vias, and metal structures have resistances on the order of tens      must be on the perimeter of the structure and be much smaller
to hundreds of milliohms. Measuring such small resistances            than the area of the structure.
accurately usually requires forcing current and measuring                 Figure 2 shows one of the most widely used forms of a van
voltage because most source-measurement instruments have              der Pauw resistivity structure: the Greek cross. The Greek cross
limited low-voltage source accuracy. However, even when current       structure yields accurate resistivity data and is easy to design
is forced through these structures, the resulting voltages are        and lay out.
small, necessitating the use of an accurate voltage measuring
instrument, such as a digital multimeter (DMM) with at least 6



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