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INSTRUCTION MANUAL
MODEL 530
TYPE.ALL SYSTEM
KEITHLEY INSTRUMENTS m
warranty
We warrant each of our products to be free from defects in material
and workmanship. Our obligation under this warranty is to repair
or replace any instrument or part thereof which, within a year after
shipment, proves defective upon examination. We will pay local
domestic surface freight costs.
To exercise this warranty, write or call your local Keithley repre-
sentative, or contact Keithley headquarters in Cleveland, Ohio.
You will be given prompt assistance and shipping instructions.
repairs and calibration
Keithley Instruments maintains a complete repair and calibration
service as well as a standards laboratory in Cleveland, Ohio. A
service facility is also located in Los Angeles for our west coast
customers.
A Keithley service facility at our Munich, Germany office is
available for our customers throughout Europe. Service in the
United Kingdom can be handled at our office in Reading. Addition-
ally, Keithley representatives in most countries maintain service
and calibration facilities.
To insure prompt repair or recalibration service, please contact
your local field representative or Keithley headquarters directly
before returning the instrument. Estimates for repairs, normal
recalibrations and calibrations traceable to the National Bureau of
Standards are available upon request.
KEITHLEY INSTRUMENTS
28776 AURORA ROAD * CLEVELAND, OHIO 44139
TELEPHONE (216) 246-0400 . TELEX 96-6469
E",,l,pr,n "dq,*: (4 Ave, "illsrdin . cti-1009 Pull". Sulsre . ,021) 281188
"nir*dXi"pdom 1 soulton Road . ReedIns . Belk*hire . ,0734, 861287
W,l, Gllmrn": H*IQlhofsIre*Se 3a . D-8000 Munchen 70 . ,081ll 745321
f,,"C.. 44 Rue Anetole France . ~llZ0 PSl.i.B.Y . (01) 928.00.48,51
CONTENTS
Section Page
ii
1
5
6
7
8
9
10
1074 PRINTED OCT 74
SPECIFICATIONS MODEL 530
SPECIFICATIONS
"OLTNETER RANGE: 21 microvolt per digit to Al000 Yolts full scale
in seven decade ranges
VOLTMETER ACCUKACY: fO.l% of reading, *1 digit on all ranges
-7 -1
CUFJENT SOURCE RANGE: 10 ampere full range to 10 ampere in
seven decade ranSes
CURRENT SOURCE ACCURACY: f0.5% of readinS, f0.05% of full range
FLANGEOF TYPING MODE: 10-3 to 104 OHM-CM
TYPING HODES: Rectification
ThetUlOeleCtIiC
PROSE CONFIG"W.TION REQUIRED: Four-point in-line probe
EQUIPMENT s"PPLIED:
Keithley Model 225 Current Source
Keithley Model 163 Digital Voltmeter
Keithley Model 530 Type-All Switching
Keithley Model '3201 Cable Assembly
SUPPLIED ACCESSOKY:
Model 5301 Test Lead (two pieces).
1074
HODEL 530 GENERAL DESCRIPTION
SECTION 1. GENERAL DESCRIPTION
1-l. GENERAL. The Keithley Model 530 Type-All System semiconductor, then a dc voltage between points B and
is an electronic system designed for measurement of D will result. The polarity of the recrificaria" de-
resisriviry and determination of conductivity rype of pends on the conductfviry type of the material. Back
a semiconductor. The Keithley System contains B pre- biasing is achieved on a metal-to-n-type semiconductor
cision current source, digital microvoltmeter, and diode when the semiconductor is at a positive potential
other circuitry needed for resisrivity and typing de- with respect to the metal. A negative potential re-
terminations. The Model 530 must be used with a stand- stilts in a back-biased junction for p-type semicon-
ard four-point in-line probe co make contact to the ductor. Thus, the semiconductor type is simply a func-
sample. tion of the polarity of the voltage monitored by the
m~c~o~oltmete~. For certain resistivities the quality
of rectification degenerates such that the usefulness
1-z. RESlSTIVITY MFASUREMENT. Resistivity of a semi- of this mode decreases. An acceptable rectification
conductor material can be easily determined by apply- action occurs for voltage readings above 0.5 m,`. For
ing a known current through the sample. The resultant voltages less than 0.5 mV the thermoelectric mode
voltage drop across the sample is the" measured using should be used.
a sensitive microvoltmeter. However, since the re-
sistiviry is a function of slice geometry and probe
spacing, several correction factors must be used.
These correction factors are explained in ASTM Desig-
nation: F84-70*. The basic factors which need ro be
considered are: b. Thermoelectric node. In this mode the ac voltage
impressed across the input probe points increases the
Slice diameter D mm temperature "ear the point oi contact by joule bear-
Average probe separation 3 mm ing of the semiconductor. A Seebeck voltage is gen-
Specimen thickness k' mm erated bewee" a hot and cold probe point where bP
is the voltage generated across rwo regions of mar-
NOTE: All dimensions are assumed to be in metric erial whose temperatures differ by AT. The physical
units unless otherwise specified. process that generares the Seebeck voltage is the dif-
The Keithley ?!odel 530 System provides the convenience fusion of the thermally generated carriers fror: the
of selectable current so that the voltage reading can hot zegio" of the material fo the cold region. The
be scaled to read directly in terms of OIL',-CX (where carriers vi11 diffuse iron high-to-lo,-concenrration
1 mv - 1 OH%-C?!) A computer program and prinrout regions, in particular from the hot to the cold probe.
(see Table 2-l) are provided in rhe Appendix of this This diffusion creates a "on-equilibrium carrier con-
Instruction ?:anual for calculating the proper current centration in the cold region which generates a" elec-
using BASIC language. tric field, opposing further diffusion. This diffu-
soon oi carriers from the hot to the cold probe con-
LX"U~S U"LII the generared electric field is suffi-
cient to overcome the tendency oi the carriers fo oif-
fuse. For example, in p-type material, the thermally
generated holes diffuse to the cold probe, building
up a positive space charge which retards further dif-
l-3. COh.DCCTIV'ITY TYPE DETH"`INATI0~. The conducr- fusion. As a result, the cold probe is more pasirive
iviry type, or sign of the najoriry carrier is a fun- than the hot probe. The use of four probe painrr per-
damental property of a semiconductor sample. The mits a separation of the ai power source and tht volr-
Model 530 Sysrelr utilizes two methods for quickly age-detection functions. In the Lfodel 530 rhe voltage
derermining the semiconductor type. This srsrem is sensing is performed by the ?lodel 163 digiral volrmeter
basically described in a" arricle entitled "`Type-All which provides speed and convenience of a digiral dis-
sysrea fC Dertrnining SerLconductar ConducCiviry play virh auromaric polarity indication. The rherno-
Type" fron, Solid Slate TechnologylYarch, 1971*. The electric mode utilizes all four probe points as show
Sysrea incor~orares rectification and rhernoelectric in Figure 3e.
typing rechr.iques in a sysfen that makes the two methods
coupatibl. A four-point in-line probe is used to
Contact the sample.
a. Recrir~cat~on Qde. Reccificaria" is the node
of operation initially used. A" ac voltage is imposed
across two of the grabe points as show" in Figure 3d.
A second ser of probe points is used to sense the po-
lariry of rhe generated volrage. The polarity depends
on how the voltage 15 generated and o" the conducririry
type of rhe material. It the probe poinrs are provid-
ing a rectification effect at the contact paint re the
0274
GENERAL DESCRIPTION MODEL 530
TABLE I-1.
Sumarv of Model 530 Controls.
Control Functional Description circuit Desip,.
POWERSwitch Applies power to Model 530 System including awtiliery SlOl
power receptacles.
PROBE Switch Selects eirher "A" or "Et" probe inputs on the rear panel. s105
FUNCTION sa Selects function for resistivity or fyping determination. s103
STANDBY Position No connections are made to probe.
CLmRF.NT position Connects current source to enable a calibration check.
VF~Q Position Connects probe to measure resistivity.
VREv Position Connects probe to measure resistivity. (reversed polarity)
TYPE (RECT) Connects probe for typing using RectificationMethod.
TYPE (THERM) connects probe for typing using Thermal Method.
CURRENT SHUNT Switch Sets resistivity range.
HI Terminal Volmeter High Input JlOb
LO Terminal Voltmeter Low Input 3107
2 0274
MODEL 530
0274
GENERAL DESCRIPTION MODEL 530
-LINE SWITCH
INPUT FOR - 5102
P-POINT PROBE
MATING CONNECTOR
-FUSE FlOl
FURNISHED
-AC POWER
FOR SYSTEM
PlOl
i
* y 6
\: :
: 0 6 i
i i
P
: i
COAXIAL CABLE- 4 i
FURNISHED
LINK
BETWEEN
LOW & GND
_I
FIGURE 2. Rear Panel connections.
` 0276
OPERAT,ON
SECTION 2. OPERATION
2-l. Keslstivity Determination: The measuremenf of the reading could also be interpreted as 173.1 OHM-CM,
resistivity ir; accomplished through the "se of 1) a
constant current source, 2) a mirrovolt meter and 3) NOTE
a four-point resist,\~iry probe. Resistivitv is scaled If the Model 163 does not indicare fhe proper
to give a direct reading in ""Y-CC: on 6 100 mV scale currenl the probe is probably not making proper
(1 Ill,' - 1 OH:-CN) Procedure: contact to rhe slice. If the Model 225 LIMIT
lamp is lighted then rhe probe connections are
Power. Connect the Model 530 to either 117 or probably open.
23:; (Set line witch S102 to proper position). Check
fuse FlOl for proper rating. The Model lb3 and 225 f. Resistivity ?leasurement. Set the Model 530 fo
line cords should be connected to auxiliary power re- Vm function (Position 3) and record the reading on
ceptacles 3104 and JlO5. the Model 163. The display is scaled fo indicate
directly in ferms of OK+C?I resistivity (1 mV = 1 OK!:-
b. Control Settings. c?:) . Since the resistivity measurement is dependent
on slice geometry (thickness, etc.) the scaling is
1. Set rhe Model 225 as follws: valid far the particular current selected from Table
2-l. If the slice dimensions are changed, a new CUT-
"L'TPUT SELECTOR -- STASDBY rent should be dialed our on the blodel 225 to provide
FILTER -- OFF direct reading in OHM-CM. Set the Model 530 to VRE\
I'OLTAGE CO\lPLIAKE -- 50 function (Position 4) to obtain a reading wirh opposite
Decade Switches -- o-o-o polarity applied. The CURRENT SHUNT switch can be in
Range -- 100 PA any position since it does not affecr the resistivity
Power On -- O!< UE%"remW,t.
2-2. Type Determination: The conductivity type can
2. Set the Hodel 163 es follows: be determined by 1 of 2 methods: Rectification Mode
or hermoelectric Mode.
Range -- 100.0 mv
power On -- ox a. Rectification Mode. Set the Model 530 to TYPE
(RICT) (Position 5). If the Model 163 indicates
3. Set the ?iodel 530 as follows: greater than 0.5 mV rhen the material type is deter-
mined by the polarity indicated on the Model 163.
Positive Polarity = P-type
PROBE -- A Negarive Polarity = N-type
CURRENT SHUZ`: -- 1K If the reading is less than 0.5 mV then proceed to
POWER -- OK the Thermoelectric Mode.
C. Connecrions. b. Thermoelectric Mode. Set the Model 530 to TYPE
(THEP.M) (position 6). The Model 163 should indicate
1. Connect Model 225 wtpuf to JlOl on Model 530. greater than 0.5 q V. The material type is determined
(Connect shorting link be&en LO-GTD on rear panel by the polarity indicated on the Model163.
of Model 225.) Positive Polarity = P-type
Negative Polarity = N-type
2. Connect Model 163 terminals to JlO6 (Red) and
5107 (Black).
d. Calibration. SET the Model 225 for proper CUI- TABLE 2-l.
rent depending on the slice dimensions of the sample. Typical Current Settings in &
Table 2-l gives the current serring for particular
slice thickness and diameter (with probe rip spacing = Slice Slice Thickness in ME: 1
I
1.60 H3, or 0.0630 inch). Diameter
in i-C!+ 0.1 0.2 0.3 0.4 0.5
e. Cannecrian Check. Connect the probe and lower
onto slice. Set the Model 530 to CUWENT function 16 41.7 83.4 125.0 166.6 208.2
(Position 2). Ad,ust the Model 530 CURRENT SHLWT 17 42.1 84.1 126.1 168.1 210.1
Switch to give the maximum on-scale reading on the 18 42.4 84.8 127.1 169.4 211.7
Model 163. The volrage displayed on the 163 is B 19 42.7 85.3 127.9 170.5 213.1
function of the current x RSHmT. The Model 163 should 20 1 42.9 85.8 128.7 171.5 214.3
indicate the output which has bee" set on the Model
225 decade dials. For example, if the current has bee" (For other slice dimensions refer to Appendix.)
set to 173.1 !JA, the Model 163 should indicate 173.1 mV
with the Model 530 Shunt Resistor set to 1K. Since the
Model 163 is scaled for direct reading of resistiviey,
1074 5
ClKCLllT DESCRIPTION MODEL 53Cl
SECTION 3. CIRCUIT DESCRIPTION
3-1. GENERAL.
The "ode1 530 provides all the co"trols,
interconnections, and circuits necessary for making re-
sistivity and semiLonductor typing determinations using
the "Type-All" system.
3-2. EQLIIPNENT USED. The Model 530 utilizes a Keithley
Model 225 Current Source, a Model I60 or 163 Digital
hltmeter, and auxiliary ac paver source. Separate
circuit descriptions are provided in the individual
Instruction Manuals for Models 163 and 225. The re-
maining circuits are described in the following para-
graph.
3-3. SWITCHING OPERATION
a. Standby Position. In this position the probe
terminals are completely disconnected from the Model
530 circuitry.
b. Current Position. In this position the Model
163 and 225 are connected such that the Model 163 will
indicate the voltage drop across one of the Shunt Re-
sisters. For euamle. with the Model 225 set at 100 UA
and a 1 kilohm Shunt Resistor selected, the Model 163
should indicate 100 mV if the probe points are making
satisfactory contact.
c. v FWD Position. In this position the Model 163
is connected so as to read the volraee dram across the
semiconductor sample. The resistivi;y is indicated
directly in terms of OHM-CM when the current setting
is scaled properly.
d. V RPV Position. In this position the Model 225
polarity is reversed autom~ticaily so as to permit a
reverse voltage across rtle sample. me Model 163 in.
dicares the resisrivity in terms of OHM-CMwhen the
current setting is scaled properly.
e. Type (Rect) Position. In this position an ac
voltage is impressed between terminals A and 8. The
Model 163 is connected between pins S and D.
i. Type (Therm) Position. In this position the
Model 163 is connected between terminals C and D. The
voltage which results from the Seebeck effect is meas-
ured at points separate from the impressed ac voltage
points.
3-4. AC POWERSUPPLY. An ac voltage is provided by
the 12.6V secondary windine of transformer TlOl. The
primary windings are connected in parallel or in series
depending on the position of the Line Switch S102. Re-
sister RiOl provides short circuit protection for the
secondary. Fuse FlOl provides over-current protection
for the primary of TlOl. Type (Therm) Position (e)
FIGLRE 3. Type-All Circuit Connections
6 0274
SECTION 4. REPLACEABLE PARTS
Mfr. Mir. Keithley
Ratinfi Type Code Desig. Part No.
5x, 5 w ww 91637 RS-5 R4.-25
".1X, l/4 w w D1686 ,009 R95-1
0.17~., l/4 w ww Dl6S6 ,009 R95-10
O.l%, 1/4w ww Dl6S6 ,009 R95-100
0.1%. 113 w w 15909 125" Ill,"-1K
KID6 10 KC lh, i/2 w DCb DCF-l/2 R12-10K
RI 07 10 M.! I')., l/2 w DCb DCF-112 RlZ-lOtI
MISCELlANEOUS
Mfr. Mfr. Keithley
Code Desig. Part NO.
FlOi Fuse, Slo-Blo, l/h,, 3AG 75915 312.500 FL,-6
JlOl Receptacle, BNC 95712 667211~34 cs-15
3102 Receptacle
-- Locking Ring, used with 5102 02660 126-1428 CS-164
_- NuC, used with 3102 02660 41-153 cs-160
3103 Receptacle
-_ Locking Ring, used with 3103 02660 41-153 cs-160
_. NUf , used vith 3103 0266" 41-153 CS-160
3104 Receptacle, Power 02660 1604 CS-248
5105 Receptacle, power 02660 1604 CS-248
3106 Binding Post, Red 58474 DF2 1RC BP,,-RED
3107 Binding Past, Biack 584i4 DFZlBC BPll-ELK
PlOl Line Cord 93656 4638-13 CO-5
SiOl Svi tch, Toggle 80164 --- SW-236
SlO2 Svirch, Slide (117-234,~) 80164 ___ Sk'-151
5103 Switch, Rotary 80164 __- SW-359
5104 Switch, Rotary 80164 --- W-358
SlO5 Switch, Toggle 80164 ___ SW-35i
TlDl Transformer 80164 ___ lx-146
-- Knob, (For S103, 5104) 80164 -__ 21660A
-- Front Panel 80164 ___ 241688
__ Chassis Assembly 80164 ___ 249418
__ Rear Panel 80164 --- 241698
-- Connector, Mate of 5103 02660 126-1427 CS-162
__ Connector Body, used with CS-162 02660 126-1425 CS-161
__ Locking Ring, used with CS-162 02660 126-1430 CS-165
__ Connector, Mate of JlO2 02660 126-1427 CS-162
__ Connector Body, used with CS-162 02660 126-1425 CS-161
__ Locking Ring, used with CS-162 02660 126-1430 CS-165
__ Cover Assembly (225) 80164 ___ 25510B
__ Cover Assembly (163) SO164 ___ 241778
__ Cable Assembly 80164 -__ Model 8201
NODIFICATIONS:
The Model 160 or 163 as supplied with the Model 530 Note: If the Model 160 is supplied the ohms function
has been modified as follows: will not be useable on the 1 megohm and 10 megohm
ranges unless the resistors (R112 and R115) are re-
Resistors R112 and RI15 have bee" removed to increase placed.
the input resistance of the voltmeter on the 100 mV
range.
1074 7
APPEh'DIX MODEL 530
I: #.I# #RYY.I #YLX.I #"##.I *I#*.* ***Y.Y YYYY.I #I##.# I###.# ###I.#
2: INCHES ##.l YX.U ,l.Y I#*# "I." #I*" I#*# "#.I #I.#
3: DIAM SLICE THICKNESS IN MlLS
4: TABLE OF CURRENT SETTINGS IN MlCReAMPERE.5
51 TO G,"E DIRECT READtNG OF RESISTIVITY ,N
61 OHM-CM CN THE 100 MF SCALE STEP c.01 MINIMUM STEP,
II DIM P(25)
20 DATA 0.997.0.992,0.9P2,0.966r0.944r0.921
2, F0R K= 0 T0 5
22 READ Q(K)
23 NEXT K
30 DATA 4.532,4.53~,4.526,4.524,4.5,7~4.5D~,4.49?,4.4~5,4.470
3, DATA 4.454,4.436,4.417.4.395.4.372,4.348,4.322,4.294,4.265,4.235
32 DATA 4.204,4.171
33 F0R K=O T0 20
34 READ P(K)
35 NEXT K
100 PRINT USING 8
110 INPUT S
120 PRINT USING 9
130 INPUT T,rT2rT3
140 PRINT USING IO
150 INPUT Dl.D2.D3
160 LET 5,s S*25.4/1000
170 PRINT
180 PRINT USING 4
190 PRINT USING 5
200 PRINT USING 6
210 PRINT USING 7rS1Sl
220 PRINT
230 PRINT
239 PRINT USING 3
240 ,-ET T2'T2+0.0000O,
24, FL?,? T= T, T0 T2 STEP T3
242 LET I=l+l
243 LET T(l)= T
244 NEXT T
250 PRlNT "SING ~,T~I~.T~~~.T~~~,T~~~~TO~T~~)~TO~T~~~~T~~~.T~~~~T~~~
251 PRINT
260 F0R D= D, TO D2 STEP D3
26, LET X=S/(D*,OOO>
262 LET 7= INT(X*200)
263 LET Xl= X*200 -7
264 LET F2= P(Y) + X,*(P(Y+,Y-P(Y))
300 F0R J= 1 50 1
310 LET X' T(J)/ S
31, IF X <= 1.0 THEN 320
312 PRINT "SLICE TH,CKNE'S/PKBBE SPACING ,S LARGER THAN 0NE"
320 IF X a= 0.5 THEN 400
330 LET F(J)= l-(X+0.006)
340 G0T0 450
400 LET Y= INT 177.6 23, .Q ?hC..Q 31C.4 350.7 397.7
44.5 89." 133.b 177.4 Z???.? ph6.5 3,C.R 355.0 39".?
64.5 R9 .P 133.5 178.0 2?%.4 266.7 311.1 355.4 39v.f'
44.6 89.1 133.6 17H.I 222.6 2i7.0 311.4 355.7 39Y.0
da.6 "0.2 133.7 ,7?,.3 222.7 267.2 3, I.6 356.0 399.2
4*.7 R9.3 133.9 K/R.4 2?2.9 267.L 311.8 356.3 399.5
LA.7 HR.3 133.9 17P.5 `23. I 367.6 31P.1 356.5 399.P
SLICE THICKNESS IN MN
".R cl.9 1.0 I., I .? 1.3 1.4 1.5 1.6
16 332.7 373.1 412.7 451.1 487.5 522.3 554.5 5RS.2 614.6
17 335.7 376.5 416.5 455.3 492.0 W7.1 559.6 590.6 620.3
I8 338.3 379.4 419.7 458.8 495.R 531.2 563.8 595. I 6?5.,
19 340.5 351.9 427.5 46, .!3 499 .o 534.6 567.6 599." 629.2
20 343.5 384.1 424.9 464.4 S", .9 537.7 570.6 602.5 632.8
PI 344.2 356.0 427.0 466.1 sc4.4 Sd(1.4 573.6 605.5 635.9
22 345.7 381.7 42R.P 468.7 506.5 542.7 i76. I 6 ◦ Jabse Service Manual Search 2024 ◦ Jabse Pravopis ◦ onTap.bg ◦ Other service manual resources online : Fixya ◦ eServiceinfo