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Model 6517
c
Electrometer
User's Manual
Contains Operating and Programming Information
WARRANTY
Keithley Instruments, Inc. warrants this product to be free from defects in material and workmanship for a period of 1 year from date of
shipment.
Keithley Instruments, Inc. warrants the following items for 90 days from the date of shipment: probes, cables, rechargeable batteries,
diskettes, and documentation.
During the warranty period, we will, at our option, either repair or replace any product that proves to be defective.
To exercise this warranty, write or call your local Keithley representative, or contact Keithley headquarters in Cleveland, Ohio. You will
be given prompt assistance and return instructions. Send the product, transportation prepaid, to the indicated service facility. Repairs
will be made and the product returned, transportation prepaid. Repaired or replaced products are warranted for the balance of the origi-
nal warranty period, or at least 90 days.
LIMITATION O WARRANTY
F
This warranty does not apply to defects resulting from product modification without Keithley's express written consent, or misuse of
any product or part. This warranty also does not apply to fuses, software, non-rechargeable batteries, damage from battery leakage, or
problems arising from normal wear or failure to follow instructions.
THIS WARRANTY IS IN LIEU OF ALL OTHER WARRANTIES, EXPRESSED OR IMPLIED, INCLUDING ANY IMPLIED
WARRANTY OF MERCHANTABILITY OR FITNESS FOR A PARTICULAR USE. THE REMEDIES PROVIDED HEREIN ARE
BUYER'S SOLE AND EXCLUSIVE REMEDIES.
NEITHER KEITHLEY INSTRUMENTS, INC. NOR ANY OF ITS EMPLOYEES SHALL BE LIABLE FOR ANY DIRECT, INDI-
RECT, SPECIAL, INCIDENTAL OR CONSEQUENTIAL DAMAGES ARISING OUT OF THE USE OF ITS INSTRUMENTS AND
SOFTWARE EVEN IF KEITHLEY INSTRUMENTS, INC., HAS BEEN ADVISED IN ADVANCE OF THE POSSIBILITY OF
SUCH DAMAGES. SUCH EXCLUDED DAMAGES SHALL INCLUDE, BUT ARE NOT LIMITED TO: COSTS OF REMOVAL
AND INSTALLATION, LOSSES SUSTAINED AS THE RESULT OF INJURY TO ANY PERSON, OR DAMAGE TO PROPERTY.
Test Instrumentation Group, Keithley Instruments, Inc. 28775 Aurora Road Cleveland. Ohio 44139 (216) 248-0400 Fax: (216) 238-6 168
CHINA
FRANCE
-
Keithley Instruments, Inc. * Holiday Inn Lido Office Building 404C * Beijing. China. 100004 861-4362871 * 861-4362871
KeithleyInstrumentsSARL.3AlldedesGarays. B.P. 60.91121 PalaiseauCedex *01-60-11-51-55-Fax: 01-60-11-77-26
GERMANY:
GREAT BRITAIN
T L
IAE
-
Keithley Instruments GmbH Landsberger Str. 6.5 * 82110 Germering 089-849307-0 Fax: 089-84930759
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Keithley Instruments, Ltd. The Minster 58 Ponman Road * Reading. Berkshire RG3 1 EA 0734-575666 * Fax: 0734-596469
Keithley Instruments SRL- Vale S. Gimignano 38 20146 Milano 02-48303008 * Fax: 02-48302274
JAPAN: Keithley Instruments Far East KK * Sumiyoshi 24 Bldg., Room 201 * 2-24-2 Sumiyoshi-cho * Naka-ku. Yokohama 231 * 81 -45-201-2246 Fax: 81 -4.5-201-2247
NETHERLANDS: Keithley Instruments BV Avelingen West 49 4202 MS Gorinchem * Postbus 559 * 4200 AN Gorinchem * 01 830-35333 Fax: 01830-30821
SWITZERLAND: Keithley Instruments SA Kriesbachstrasse 4 * 8600 Diibendorf 01821-9444 * Fax: 01 -820-3081
TAIWAN Keithley Instruments Taiwan 3rd Floor, Number 6 . Section 3. Min Chuan East Road Taipei. R.O.C. 846-2-509-4165 Fax: 886-2-509-4473
0
Model 651 7 Electrometer
User's Manual
0 994, Keithley Instruments, Inc.
1
Test Instrumentation Group
All rights reserved.
Cleveland, Ohio, U.S.A.
Fourth Printing July 1995
Document Number: 651 7-900-01 Rev. D
Manual Print History
The print history shown below lists the printing dates of all Revisions and Addenda created for this manual. The Revision
Level letter increases alphabetically as the manual undergoes subsequent updates. Addenda, which are released between Revi-
sions, contain important change information that the user should incorporate immediately into the manual. Addenda are num-
bered sequentially. When a new Revision is created, all Addenda associated with the previous Revision of the manual are
incorporated into the new Revision of the manual. Each new Revision includes a revised copy of this print history page.
Revision A (Document Number 6517-900-01)............................................................... September 1994
Revision B (Document Number 6517-900-01) ......................................... October 1994
Addendum B (Document Number 6517-900-0 ..................................... December 1994
Addendum B (Document Number 6517-900-03) .............................................................................. February 1995
Revision C (Document Number 6517-900-01) .......................... .........
March 1995
Addendum C (Document Number 6517-900-02) .................................................................... June 1995
Revision D (Document Number 6517-900-01) ......................................................................................... July 1995
All Keithley product names are trademarks or registered trademarks of Keithley Instruments, Inc.
Other brand and product names are trademarks or registered trademarks of their respective holders.
Safety Precautions
The following safety precautions should be observed before using Do not exceed the maximum signal levels of the instruments and
this product and any associated instrumentation. Although some in- accessories, as defined in the specifications and operating informa-
struments and accessories would normally be used with non-haz- tion, and as shown on the instrument or test fixture rear panel. or
ardous voltages, there are situations where hazardous conditions switching card.
may be present.
Do not connect switching cards directly to unlimited power circuits.
This product is intended for use by qualified personnel who recog- They are intended to be used with impedance limited sources.
nize shock hazards and are familiar with the safety precautions re- NEVER connect switching cards directly to AC main. When con-
quired to avoid possible injury. Read the operating information necting sources to switching cards, install protective devices to lim-
carefully before using the product. it fault current and voltage to the card.
Exercise extreme caution when a shock hazard is present. Lethal When fuses are used in a product. replace with same typc and rating
voltage may be present on cable connector jacks or test fixtures. for continued protection against fire hazard.
The American National Standards Institute (ANSI) states that a
shock hazard exists when voltage levels greater than 30V RMS, Chassis connections must only be used as shield conncctions for
42.4V peak, or 60VDC are present. A good safety practice is to ex- measuring circuits, NOT as safety earth ground connections.
pect that hazardous voltage is present in any unknown circuit
before measuring.
If you are using a test fixture, keep the lid closed whilc power is ap-
plied to the device under test. Safe operation requires the use of a
Before operating an instrument, make sure the line cord is connect- lid interlock.
ed to a properly grounded power receptacle. Inspect the connecting
cables, test leads, and jumpers for possible wear, cracks, or breaks
before each use. If a @ screw is present, connect it to safety earth ground using
#18 AWG or larger wire.
For maximum safety, do not touch the product, test cables, or any
other instruments while power is applied to the circuit under test. The f symbol on an instrument or accessory indicates that IOOOV
ALWAYS remove power from the entire test system and discharge or more may be present on the terminals. Refer to the product man-
any capacitors before: connecting or disconnecting cables or jump- ual for detailed operating information.
ers, installing or removing switching cards, or making internal
changes, such as installing or removing jumpers. Instrumentation and accessories should not be connected to hu-
mans.
Do not touch any object that could provide a current path to the
common side of the circuit under test or power line (earth) ground. Maintenance should be performed by qualilicd service pcrsonncl.
Always make measurements with dry hands while standing on a Before performing any maintenance. disconnect the line cord and
dry, insulated surface capable of withstanding the voltage being all test cables.
measured.
Table of Contents
1 General Information
1.1 Introduction ......................................................................................................................................................... 1-1
1.2 Features ............................................................................................................................................................... 1-1
1.3 Warranty information.......................................................................................................................................... 1-2
1.4 Manual addenda .................................................................................................................................................. 1-2
1.5 Safety symbols and terms ................................................................................................................................... 1-2
1.6 Specifications ...................................................................................................................................................... 1-2
1.7 Inspection ............................................................................................................................................................ 1-2
1.8 Options and accessories ...................................................................................................................................... 1-2
2 Front Panel Operation
2.1 Introduction ......................................................................................................................................................... 2-1
2.2 Power-up ............................................................................................................................................................. 2-2
2.2.1 Line power connections ............................................................................................................................... 2-2
2.2.2 Line fuse replacement .................................................................................................................................. 2-2
2.2.3 Power-up sequence ...................................................................................................................................... 2-3
2.2.4 Power-on default conditions ........................................................................................................................ 2-3
2.2.5 Warm-up period ........................................................................................................................................... 2-4
2.2.6 IEEE-488 primary address ........................................................................................................................... 2-4
2.3 Display ................................................................................................................................................................ 2-4
2.3.1 Exponent mode (Engineering or Scientific)................................................................................................. 2-4
2.3.2 Information messages .................................................................................................................................. 2-4
2.3.3 Status and error messages ............................................................................................................................ 2-5
2.3.4 Multiple displays.......................................................................................................................................... 2-7
2.3.5 Navigating menus ........................................................................................................................................ 2-9
2.4 Connections -- electrometer, high-resistance meter and V-source .................................................................... 2-9
2.4.1 Electrometer input connector ....................................................................................................................... 2-9
2.4.2 High-resistance meter connections ............................................................................................................ 2-11
2.4.3 Voltage source output connections ............................................................................................................ 2-11
2.4.4 Low noise cables, shielding and guarding ................................................................................................. 2-12
2.4.5 Floating circuits.......................................................................................................................................... 2-13
2.4.6 Test fixtures................................................................................................................................................ 2-15
2.5 Voltage measurements ...................................................................................................................................... 2-18
2.5.1 Basic measurement procedure ................................................................................................................... 2-18
2.5.2 Volts configuration .................................................................................................................................... 2-21
2.5.3 Voltage measurement considerations......................................................................................................... 2-22
2.6 Current measurements....................................................................................................................................... 2-24
2.6.1 Basic measurement procedure .................................................................................................................. 2-24
2.6.2 Amps configuration................................................................................................................................... 2-27
2.6.3 Current measurement considerations ......................................................................................................... 2-28
i
2.7 Resistance and resistivity measurements........................................................................................................... 2-32
2.7.1 Resistance measurements .......................................................................................................................... 2-33
2.7.2 Resistivity measurements .......................................................................................................................... 2-36
2.7.3 Ohms configuration ....................................................................................................................................2-39
2.7.4 Multiple display..........................................................................................................................................2-42
2.7.5 Ohms measurement considerations ............................................................................................................2-42
2.8 Charge measurements (Q) ................................................................................................................................. 2-42
2.8.1 Basic measurement procedure................................................................................................................... 2-43
2.8.2 Coulombs configuration ............................................................................................................................ 2-43
2.8.3 Charge measurement considerations ..........................................................................................................2-45
2.9 Voltage source ................................................................................................................................................... 2-46
2.9.1 Sourcing options........................................................................................................................................ 2-46
2.9.2 Setting voltage source value...................................................................................................................... 2-48
2.9.3 Voltage and current limit............................................................................................................................2-49
2.9.4 Interlock and test fixtures ...........................................................................................................................2-50
2.9.5 Operate .......................................................................................................................................................2-50
2.10 Analog outputs................................................................................................................................................... 2-50
2.10.1 2V analog output ....................................................................................................................................... 2-51
2.10.2 Preamp out................................................................................................................................................. 2-52
2.11 Using external feedback .................................................................................................................................... 2-54
2.11.1 Electrometer input circuitry....................................................................................................................... 2-54
2.11.2 Shielded fixture construction..................................................................................................................... 2-54
2.11.3 External feedback procedure ..................................................................................................................... 2-55
2.11.4 Non-standard coulombs ranges ................................................................................................................. 2-56
2.11.5 Logarithmic currents ..................................................................................................................................2-56
2.11.6 Non-decade current gains ...........................................................................................................................2-57
2.12 Range and resolution ......................................................................................................................................... 2-57
2.12.1 Measurement range ....................................................................................................................................2-57
2.12.2 Display resolution.......................................................................................................................................2-57
2.13 Zero check, relative and zero correct .................................................................................................................2-58
2.13.1 Zero check ..................................................................................................................................................2-58
2.13.2 Relative (REL)............................................................................................................................................2-59
2.13.3 Zero correct ................................................................................................................................................2-60
2.14 Test sequences ....................................................................................................................................................2-60
2.14.1 Test descriptions.........................................................................................................................................2-60
2.14.2 Configure Test Sequence............................................................................................................................2-68
2.14.3 Running the selected test ............................................................................................................................2-70
2.15 Triggers...............................................................................................................................................................2-71
2.15.1 Trigger model .............................................................................................................................................2-73
2.15.2 Basic trigger configuration .........................................................................................................................2-76
2.15.3 Advanced trigger configuration..................................................................................................................2-77
2.15.4 External triggering......................................................................................................................................2-81
2.15.5 Trigger Link................................................................................................................................................2-83
2.16 Buffer..................................................................................................................................................................2-94
2.16.1 Configuring data storage ............................................................................................................................2-96
2.16.2 Storing and recalling readings ....................................................................................................................2-98
2.16.3 Buffer multiple displays ...........................................................................................................................2-100
2.17 Filters................................................................................................................................................................2-100
2.17.1 Digital Filters............................................................................................................................................2-101
2.17.2 Median filter .............................................................................................................................................2-101
2.17.3 Configuring the filters ..............................................................................................................................2-103
2.18 Math..................................................................................................................................................................2-105
2.18.1 Polynomial................................................................................................................................................2-105
2.18.2 Percent ......................................................................................................................................................2-105
ii
2.18.3 Percent deviation...................................................................................................................................... 2-105
2.18.4 Deviation .................................................................................................................................................. 2-105
2.18.5 Ratio ......................................................................................................................................................... 2-106
2.18.6 Logarithmic .............................................................................................................................................. 2-106
2.18.7 Selecting and configuring math ............................................................................................................... 2-106
2.18.8 Calculate multiple display........................................................................................................................ 2-107
2.19 Menu ................................................................................................................................................................ 2-107
2.19.1 SAVESETUP ........................................................................................................................................... 2-110
2.19.2 COMMUNICATION............................................................................................................................... 2-116
2.19.3 CAL.......................................................................................................................................................... 2-117
2.19.4 TEST ........................................................................................................................................................ 2-118
2.19.5 LIMITS .................................................................................................................................................... 2-118
2.19.6 STATUS-MSG......................................................................................................................................... 2-120
2.19.7 GENERAL ............................................................................................................................................... 2-120
2.20 Scanning........................................................................................................................................................... 2-123
2.20.1 Internal scanning ...................................................................................................................................... 2-123
2.20.2 External scanning ..................................................................................................................................... 2-123
2.21 Other measurement considerations .................................................................................................................. 2-124
2.21.1 Ground loops............................................................................................................................................ 2-124
2.21.2 Triboelectric effects ................................................................................................................................. 2-124
2.21.3 Piezoelectric and stored charge effects .................................................................................................... 2-124
2.21.4 Electrochemical effects ............................................................................................................................ 2-125
2.21.5 Humidity .................................................................................................................................................. 2-125
2.21.6 Light ......................................................................................................................................................... 2-125
2.21.7 Electrostatic interference.......................................................................................................................... 2-125
2.21.8 Magnetic fields......................................................................................................................................... 2-125
2.21.9 Electromagnetic interference (EMI) ........................................................................................................ 2-126
2.22 Relative humidity and external temperature readings...................................................................................... 2-126
3 IEEE-488 Reference
3.1 Introduction ......................................................................................................................................................... 3-1
3.2 Connections......................................................................................................................................................... 3-2
3.2.1 IEEE-488 bus connections ........................................................................................................................... 3-2
3.2.2 RS-232 serial interface connections............................................................................................................. 3-3
3.3 GPIB primary address selection.......................................................................................................................... 3-3
3.4 GPIB programming language selection .............................................................................................................. 3-4
3.5 QuickBASIC 4.5 programming .......................................................................................................................... 3-4
3.6 General bus commands ....................................................................................................................................... 3-5
3.6.1 REN (remote enable) ................................................................................................................................... 3-5
3.6.2 IFC (interface clear) ..................................................................................................................................... 3-5
3.6.3 LLO (local lockout) ..................................................................................................................................... 3-6
3.6.4 GTL (go to local) ......................................................................................................................................... 3-6
3.6.5 DCL (device clear)....................................................................................................................................... 3-6
3.6.6 SDC (selective device clear) ........................................................................................................................ 3-6
3.6.7 GET (group execute trigger) ........................................................................................................................ 3-6
3.6.8 SPE, SPD (serial polling)............................................................................................................................. 3-6
3.7 Front panel aspects of IEEE-488 operation ........................................................................................................ 3-7
3.7.1 Error and status messages ............................................................................................................................ 3-7
3.7.2 IEEE-488 status indicators........................................................................................................................... 3-7
3.7.3 LOCAL key.................................................................................................................................................. 3-7
3.8 Status structure .................................................................................................................................................... 3-7
3.8.1 Condition registers .................................................................................................................................... 3-14
iii
3.8.2 Transition filters ........................................................................................................................................ 3-14
3.8.3 Event registers ............................................................................................................................................3-15
3.8.4 Enable registers ..........................................................................................................................................3-15
3.8.5 Queues ........................................................................................................................................................3-15
3.8.6 Status byte and service request (SRQ) .......................................................................................................3-16
3.9 Trigger Model (IEEE-488 operation)................................................................................................................ 3-18
3.10 Programming syntax...........................................................................................................................................3-21
3.11 Common commands...........................................................................................................................................3-27
3.11.1 *CLS -- clear status...................................................................................................................................3-27
3.11.2 *ESE -- event enable ....................................................................................................................3-28
ESE? -- event enable query
3.11.3 *ESR? -- event status register query .........................................................................................................3-29
3.11.4 *IDN? -- identification query....................................................................................................................3-30
3.11.5 *OPC -- operation complete......................................................................................................................3-31
3.11.6 *OPC? -- operation complete query..........................................................................................................3-32
3.11.7 *OPT? -- option identification query ........................................................................................................3-33
3.11.8 *RCL -- recall ...........................................................................................................................................3-33
3.11.9 *RST -- reset the Model 6517...................................................................................................................3-33
3.11.10 *SAV -- save the current setup in memory...............................................................................................3-33
3.11.11 *SRE -- service request enable .....................................................................................................3-34
SRE? -- service request enable query........................................................................................................3-34
3.11.12 *STB? -- status byte query........................................................................................................................3-35
3.11.13 *TRG -- trigger .........................................................................................................................................3-36
3.11.14 *TST? -- self-test query ............................................................................................................................3-36
3.11.15 *WAI -- wait-to-continue..........................................................................................................................3-36
3.12 Signal oriented measurement commands ...........................................................................................................3-38
3.13 Calculate subsystems..........................................................................................................................................3-61
3.13.1 :CALCulate[1]............................................................................................................................................3-61
3.13.2 :CALCulate2...............................................................................................................................................3-64
3.13.3 :CALCulate3...............................................................................................................................................3-66
3.14 :CALibration subsystem.....................................................................................................................................3-70
3.15 :DISPlay subsystem............................................................................................................................................3-71
3.16 :FORMat subsystem ...........................................................................................................................................3-74
3.17 Output Subsystems .............................................................................................................................................3-79
3.18 :ROUTe subsystem.............................................................................................................................................3-80
3.18.1 :CLOSe .............................................................................................................................................3-80
3.18.2 :OPEN ..............................................................................................................................................3-80
3.18.3 :OPEN:ALL................................................................................................................................................3-81
3.18.4 :SCAN commands ......................................................................................................................................3-81
3.19 :SENSe1 subsystem............................................................................................................................................3-84
3.19.1 [:SENSe[1]] subsystem ..............................................................................................................................3-84
3.19.2 :FUNCtion ....................................................................................................................................3-84
3.19.3 :DATA commands......................................................................................................................................3-84
3.19.4 :APERture ...........................................................................................................................................3-85
3.19.5 :NPLCycles .........................................................................................................................................3-86
3.19.6 RANGe commands.....................................................................................................................................3-88
3.19.7 :REFerence ..........................................................................................................................................3-93
3.19.8 :IREFerence ........................................................................................................................................3-94
3.19.9 :DIGits .................................................................................................................................................3-94
3.19.10 :AVERage commands ................................................................................................................................3-95
3.19.11 :MEDian Commands ..................................................................................................................................3-98
3.19.12 :DAMPing ...........................................................................................................................................3-98
3.19.13 :GUARd ..............................................................................................................................................3-99
3.19.14 :ADIScharge Commands............................................................................................................................3-99
iv
3.19.15 :XFEedback ...................................................................................................................................... 3-100
3.19.16 :VSControl ................................................................................................................................. 3-100
3.19.17 :MSELect ................................................................................................................................... 3-100
3.19.18 :RESistivity commands............................................................................................................................ 3-100
3.20 :SOURce subsystem......................................................................................................................................... 3-103
3.20.1 Digital Output Commands ....................................................................................................................... 3-103
3.20.2 V-Source Configuration Commands:....................................................................................................... 3-103
3.21 :STATus subsystem ......................................................................................................................................... 3-106
3.21.1 [:EVENt]? ................................................................................................................................................ 3-106
3.21.2 :ENABle ...................................................................................................................................... 3-111
3.21.3 :PTRansition ................................................................................................................................ 3-114
3.21.4 :NTRansition ................................................................................................................................ 3-121
3.21.5 :CONDition? ............................................................................................................................................ 3-123
3.21.6 :PRESet .................................................................................................................................................... 3-123
3.21.7 :QUEue commands .................................................................................................................................. 3-124
3.22 :SYSTem subsystem ........................................................................................................................................ 3-127
3.22.1 :PRESet .................................................................................................................................................... 3-127
3.22.2 :POSetup .................................................................................................................................... 3-127
3.22.3 :VERSion? ............................................................................................................................................... 3-127
3.22.4 :ERRor?.................................................................................................................................................... 3-127
3.22.5 :LSYNc:STATe ................................................................................................................................ 3-128
3.22.6 :KEY ............................................................................................................................................ 3-128
3.22.7 :CLEar ...................................................................................................................................................... 3-129
3.22.8 :DATE , , ..................................................................................................................... 3-130
3.22.9 :TIME
, , ...................................................................................................................... 3-130
3.22.10 :TSTamp commands ................................................................................................................................ 3-130
3.22.11 :RNUMber:RESet .................................................................................................................................... 3-131
3.22.12 Zero check and zero correct commands................................................................................................... 3-131
3.22.13 A/D Controls ............................................................................................................................................ 3-132
3.22.14 RS-232 Interface Commands ................................................................................................................... 3-133
3.22.15 Basic Trigger Commands......................................................................................................................... 3-133
3.23 :TRACe subsystem .......................................................................................................................................... 3-135
3.23.1 :CLEar ...................................................................................................................................................... 3-135
3.23.2 :FREE? ..................................................................................................................................................... 3-135
3.23.3 :POINts ............................................................................................................................................. 3-135
3.23.4 :FEED Commands ................................................................................................................................... 3-136
3.23.5 :DATA?.................................................................................................................................................... 3-139
3.23.6 :TSTamp:FORMat ..................................................................................................................... 3-139
3.23.7 :ELEMents - ............................................................................................................................. 3-139
3.24 Trigger subsystem ............................................................................................................................................ 3-140
3.24.1 :INITiate commands ................................................................................................................................ 3-140
3.24.2 :ABORt .................................................................................................................................................... 3-140
3.24.3 :IMMediate............................................................................................................................................... 3-141
3.24.4 :COUNt
............................................................................................................................................. 3-141
3.24.5 :DELay .............................................................................................................................................. 3-141
3.24.6 :SOURce .................................................................................................................................... 3-142
3.24.7 :TIMer ............................................................................................................................................... 3-142
3.24.8 :SIGNal .................................................................................................................................................... 3-143
3.24.9 TCONfigure commands ........................................................................................................................... 3-143
3.24.10 RTCLock commands ............................................................................................................................... 3-145
3.25 :TSEQuence Subsystem ................................................................................................................................... 3-146
3.25.1 General Test Sequence Commands.......................................................................................................... 3-146
3.25.2 :STARt ......................................................................................................................................... 3-147
3.25.3 :STOP .......................................................................................................................................... 3-148
v
3.25.4 :STEP ...........................................................................................................................................3-148
3.25.5 :MDELay .....................................................................................................................................3-148
3.25.6 :SVOLtage ...................................................................................................................................3-149
3.25.7 :STIMe .........................................................................................................................................3-149
3.25.8 :DTIMe .........................................................................................................................................3-149
3.25.9 :PDTIMe ......................................................................................................................................3-150
3.25.10 :MVOLtage ..................................................................................................................................3-150
3.25.11 :MTIMe ........................................................................................................................................3-151
3.25.12 :HLEVel .......................................................................................................................................3-151
3.25.13 :HTIMe .........................................................................................................................................3-151
3.25.14 :LLEVel .......................................................................................................................................3-151
3.25.15 :LTIMe .........................................................................................................................................3-152
3.25.16 :COUNt ........................................................................................................................................3-152
3.25.17 Test sequence programming example ......................................................................................................3-152
3.26 UNIT Subsystem ..............................................................................................................................................3-153
3.27 RS-232 Serial Interface ....................................................................................................................................3-154
3.27.1 RS-232 Interface Configuration ...............................................................................................................3-154
3.27.2 RS-232 Operating Considerations............................................................................................................3-154
3.27.3 RS-232 Interface Error Messages.............................................................................................................3-155
3.27.4 Downloading commands using ProComm...............................................................................................3-155
3.28 DDC programming language ...........................................................................................................................3-155
A Specifications
B Interface Functions Codes
C ASCII Character Codes and IEEE-488 Multiline Interface Command Messages
D IEEE-488 Bus Overview
E IEEE-488 Conformance Information
F SCPI Conformance Information
G Device Dependent Command Summary
vi
List of Illustrations
2 Calibration
Figure 2- 1 Line voltage................................................................................................................................................. 2-2
Figure 2-2 Bar graph (zero-at-left) multiple display ..................................................................................................... 2-7
Figure 2-3 Zero-centered bar graph multiple display ................................................................................................... 2-7
Figure 2-4 Maximum and minimum multiple display .................................................................................................. 2-8
Figure 2-5 Input connector configurations ................................................................................................................... 2-9
Figure 2-6 Maximum input levels .............................................................................................................................. 2-10
Figure 2-7 Capacitor test circuit without protection ................................................................................................... 2-10
Figure 2-8 Capacitor test circuit with protection ........................................................................................................ 2-10
Figure 2-9 Force voltage measure current ................................................................................................................... 2-11
Figure 2-10 V-source output .......................................................................................................................................... 2-11
Figure 2-1 1 Noise shield ................................................................................................................................................ 2-12
Figure 2-12 Guard shield ............................................................................................................................................... 2-13
Figure 2- 13 Safety shield ............................................................................................................................................... 2-13
Figure 2- 14 Floating measurements .............................................................................................................................. 2-14
Figure 2- 15 Floating V-source ....................................................................................................................................... 2-14
Figure 2- 16 Test fixture to source voltage, measure current (resistance measurements) .............................................. 2-16
Figure 2- 17 Multi-purpose test fixture ........................................................................................................................... 2-17
Figure 2- 18 Interlock connections ................................................................................................................................. 2-17
Figure 2- 19 Hard-wired interlock .................................................................................................................................. 2-18
Figure 2-20 Typical connections for unguarded voltage measurements ....................................................................... 2-19
Figure 2-21 Typical connections for guarded voltage measurements ........................................................................... 2-20
Figure 2-22 Meter loading ............................................................................................................................................. 2-23
Figure 2-23 Unguarded voltage measurements ............................................................................................................. 2-23
Figure 2-24 Guarded voltage measurements ................................................................................................................. 2-24
Figure 2-25 Typical connections for current measurements .......................................................................................... 2-25
Figure 2-26 Connections for guarded, floating current measurements.......................................................................... 2-26
Figure 2-27 Voltage burden considerations ................................................................................................................... 2-29
Figure 2-28 Source resistance and capacitance ............................................................................................................. 2-30
Figure 2-29 High impedance current measurements ..................................................................................................... 2-31
Figure 2-30 Floating current measurements .................................................................................................................. 2-31
Figure 2-3 1 Typical connections for resistance measurements ..................................................................................... 2-34
Figure 2-32 Connections for resistance measurements using Model 8002A test fixture .............................................. 2-35
Figure 2-33 Surface resistivity measurement technique ................................................................................................ 2-36
Figure 2-34 Circular electrode dimensions .................................................................................................................... 2-37
Figure 2-35 Volume resistivity measurement technique ............................................................................................... 2-37
Figure 2-36 Connections for measurements using Model 8009 test fixture .................................................................. 2-39
Figure 2-37 Typical connections for charge measurements .......................................................................................... 2-44
Figure 2-38 V-source (independent configuration) ....................................................................................................... 2-47
Figure 2-39 V-source (FVMI configuration) ................................................................................................................. 2-48
Figure 2-40 Typical 2V analog output connections ....................................................................................................... 2-51
vii
Figure 2-41 Typical preamp out connections ................................................................................................................. 2-53
Figure 2-42 Electrometer input circuitry (external feedback mode) .............................................................................. 2-54
Figure 2-43 Shielded fixture construction ...................................................................................................................... 2-55
Figure 2-44 "Transdiode" logarithmic current configuration ........................................................................................ 2.57
Figure 2-45 Non-decade current gains ........................................................................................................................... 2-58
Figure 2-46 Equivalent input i
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